Wavelength-modulated standing-wave interferometry for small out-of-plane displacement measurement

Keyphrases

• Standing Wave 100%
• Interferometry 100%
• Out-of-plane Displacement 100%
• Out-of-plane Displacement Measurement 100%
• Phase Variation 33%
• Phase Quadrature 33%
• Periodic Nonlinearity 33%
• Nonlinear Error 33%
• Nanospheres 33%
• Modulated Light 33%
• Light Beam 33%
• Angular Frequency 33%
• Nanometric Resolution 33%

Engineering

• Interferometry 100%
• Standing Wave 100%
• Displacement Measurement 100%
• Time Domain 33%
• Scattered Light 33%
• Superposition 33%
• Nanosphere 33%
• Angular Frequency 33%
• Nonlinearity 33%
• Light Beams 33%

Physics

• Standing Wave 100%
• Interferometry 100%
• Nanosphere 33%
• Light Beams 33%