摘要
Focal plane testing methods such as the Shack-Hartmann wavefront sensor and phase-shifting deflectometry are valuable tools for optical testing. In this study, we propose a novel wavefront slope testing method that uses a scanning galvo laser, in which a single-mode Gaussian beam scans the pupils of the tested optics in the system. In addition, the ray aberration is reconstructed by the four-step phase-shifting measurement by modulating the angular domain. The measured wavefront is verified by a Fizeau interferometer in terms of Zernike polynomials.
原文 | ???core.languages.en_GB??? |
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頁(從 - 到) | E235-E240 |
期刊 | Applied Optics |
卷 | 54 |
發行號 | 28 |
DOIs | |
出版狀態 | 已出版 - 10月 2015 |