Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization

Katherine Shu Min Li, Leon Li Yang Chen, Peter Yi Yu Liao, Sying Jyan Wang, Andrew Yi Ann Huang, Leon Chou, Nova Cheng Yeh Tsai, Ken Chau Cheung Cheng, Gus Chang Hung Han, Chen Shiun Lee, Jwu E. Chen, Hsing Chung Liang, Chung Lung Hsu