Visualizing Ferroelectric Uniformity of Hf1- xZr xO2Films Using X-ray Mapping

Shu Jui Chang, Chih Yu Teng, Yi Jan Lin, Tsung Mu Wu, Min Hung Lee, Bi Hsuan Lin, Mau Tsu Tang, Tai Sing Wu, Chenming Hu, Ethan Ying Tsan Tang, Yuan Chieh Tseng

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)

摘要

Hf1-xZrxO2 (HZO) is a complementary metal-oxide-semiconductor (CMOS)-compatible ferroelectric (FE) material with considerable potential for negative capacitance field-effect transistors, ferroelectric memory, and capacitors. At present, however, the deployment of HZO in CMOS integrated circuit (IC) technologies has stalled due to issues related to FE uniformity. Spatially mapping the FE distribution is one approach to facilitating the optimization of HZO thin films. This paper presents a novel technique based on synchrotron X-ray nanobeam absorption spectroscopy capable of mapping the three main phases of HZO (i.e., orthorhombic (O), tetragonal (T), and monoclinic (M)). The practical value of the proposed methodology when implemented in conjunction with kinetic-nucleation modeling is demonstrated by our development of a T → O annealing (TOA) process to optimize HZO films. This process produces an HZO film with the largest polarization values (Ps = 64.5 μC cm-2 Pr = 35.17 μC cm-2) so far, which can be attributed to M-phase suppression followed by low-temperature annealing for the induction of a T → O phase transition.

原文???core.languages.en_GB???
頁(從 - 到)29212-29221
頁數10
期刊ACS Applied Materials and Interfaces
13
發行號24
DOIs
出版狀態已出版 - 23 6月 2021

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