Varying stress of SiOxCy thin films deposited by plasma polymerization

Wei Bo Liao, Ya Chen Chang, Cheng Chung Jaing, Ching Long Cheng, Cheng Chung Lee, Hung Sen Wei, Chien Cheng Kuo

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy