Vacuum measurement using total-internal-reflection heterodyne interferometry

Ming Horng Chiu, Ju Yi Lee, Der Chin Su, King Hung Lee

研究成果: 雜誌貢獻期刊論文同行評審

13 引文 斯高帕斯(Scopus)

摘要

Based on the effect that the phase difference between s- and p-polarizations at the total-internal-reflection is changed with the variation of the air refractive index, which is related to the air pressure, a new optical method for measuring the air pressure of a vacuum cavity is proposed. From the experimental curve of the phase difference variation measured by the heterodyne interferometry and the calibrated pressure measurement of a vacuum cavity, an empirical formula is derived. With this empirical formula, the measurable range of this new optical method is 760 to 0.1 torr.

原文???core.languages.en_GB???
頁(從 - 到)260-263
頁數4
期刊Precision Engineering
23
發行號4
DOIs
出版狀態已出版 - 10月 1999

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