Ultrasensitive Thin-Film-Based AlxGa1-xN Piezotronic Strain Sensors via Alloying-Enhanced Piezoelectric Potential

Chao Hung Wang, Kun Yu Lai, Yi Chang Li, Yen Chih Chen, Chuan Pu Liu

研究成果: 雜誌貢獻期刊論文同行評審

30 引文 斯高帕斯(Scopus)

摘要

AlxGa1-xN thin-film-based piezotronic strain sensors with ultrahigh strain sensitivity are fabricated through alloying of AlN with GaN. The strain sensitivity of the ternary compound AlxGa1-xN is higher than those of the individual binary compounds GaN and AlN. Such a high performance can be attributed to the piezoelectric constant enhancement via intercalation of Al atoms into the GaN matrix, the effect of residual strain, and a suppressed screening effect.

原文???core.languages.en_GB???
頁(從 - 到)6289-6295
頁數7
期刊Advanced Materials
27
發行號40
DOIs
出版狀態已出版 - 1 10月 2015

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