Ultra-high bandwidth (570 GHz) metal-semiconductor-metal traveling-wave-photodetectors

Jin Wei Shi, Kian Giap Gan, Yi Jen Chiu, Yen Hung Chen, Chi Kuang Sun, Ying Jay Yang, John E. Bowers

研究成果: 書貢獻/報告類型會議論文篇章同行評審

1 引文 斯高帕斯(Scopus)

摘要

We demonstrate a novel type of ultra-high speed traveling wave photodetector: "metal-semiconductor-metal traveling wave photodetector" (MSM TWPD), and characterized it's ultrahigh electrical bandwidth by E-O sampling technique. The device was fabricated using low-temperature grown GaAs (LTG-GaAs). In order to achieve high internal quantum efficiency, the narrow spacing between electrodes was fabricated by self-aligned process without e-beam lithography. E-O sampling measurement results at different optical pumping level are reported. Ultra-high bandwidth (0.8 ps, 570 GHz transform bandwidth) performance was observed even under high optical power illumination (∼2.2 mW) with 8.1% net quantum efficiency. Compared with LTG-GaAs based p-i-n TWPD and vertically illuminated MSM photodetector (PD), this novel TWPD has higher output saturation current with near THz electrical bandwidth, better quantum efficiency, and can be easily fabricated and integrated with other microwave devices. By utilizing the ultra-high speed performance of this device, we also studied the microwave propagation effect of its generated subpicosecond electrical pulse on integrated CPW line. The measurement results also reveals some microwave behavior of CPW line in near THz frequency regime, which are quit important due to high speed data linking or transmission.

原文???core.languages.en_GB???
主出版物標題Asia-Pacific Microwave Conference Proceedings, APMC
頁面358-361
頁數4
出版狀態已出版 - 2001
事件2001 Asia-Pacific Microwave Conference - Taipei, Taiwan
持續時間: 3 12月 20016 12月 2001

出版系列

名字Asia-Pacific Microwave Conference Proceedings, APMC
1

???event.eventtypes.event.conference???

???event.eventtypes.event.conference???2001 Asia-Pacific Microwave Conference
國家/地區Taiwan
城市Taipei
期間3/12/016/12/01

指紋

深入研究「Ultra-high bandwidth (570 GHz) metal-semiconductor-metal traveling-wave-photodetectors」主題。共同形成了獨特的指紋。

引用此