Turbulence-induced anomalous currents in RF magnetron plasmas

研究成果: 雜誌貢獻期刊論文同行評審

2 引文 斯高帕斯(Scopus)

摘要

Large-amplitude density fluctuations are observed in a low-pressure RF magnetron discharge. The state of the discharge shows an abnormal behaviour which indicates the presence of anomalous charge transport in addition to the classical collisional transport. The coupling between the axial magnetic field and the electric field of the ionisation-drift turbulence gives rise to a cross-field electron drift, and in turn enhances the currents onto the magnetron electrode.

原文???core.languages.en_GB???
文章編號025
頁(從 - 到)398-400
頁數3
期刊Journal of Physics D: Applied Physics
20
發行號3
DOIs
出版狀態已出版 - 1987

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