Tunable defect engineering of Mo/TiON electrode in angstrom-laminated HfO2/ZrO2 ferroelectric capacitors towards long endurance and high temperature retention

Sheng Min Wang, Cheng Rui Liu, Yu Ting Chen, Shao Chen Lee, Ying Tsan Tang

研究成果: 雜誌貢獻期刊論文同行評審

2 引文 斯高帕斯(Scopus)

指紋

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Keyphrases

Material Science

Engineering