Transparent hard coatings deposited by a combined HIPIMS/CFUBMS deposition technique

Bo Huei Liao, Chien Nan Hsiao, Ming Hua Shiao, Sheng Hui Chen

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this research, silicon nitride and silicon oxynitride films are prepared by a combined high-power impulse and closed field unbalanced magnetron sputtering (HIPIMS/CFUBMS) deposition technique. The average transmittance of the Si3N4 films on the glass in the visible range is 83.9 % and its hardness is 29.8 Gpa. After introducing 3 sccm O2 gas, the hardness of silicon oxynitride films decreases to 19 Gpa. However its average transmittance on the glass increases to 88.6 % in the visible range. Finally a 5-layer AR coating is deposited on one side glass. Its average transmittance is 93.2 % and its hardness is larger to 19 Gpa.

原文???core.languages.en_GB???
主出版物標題Optical Interference Coatings, OIC 2016
發行者OSA - The Optical Society
ISBN(列印)9781943580132
DOIs
出版狀態已出版 - 2016
事件Optical Interference Coatings, OIC 2016 - Tucson, United States
持續時間: 19 6月 201624 6月 2016

出版系列

名字Optics InfoBase Conference Papers

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???event.eventtypes.event.conference???Optical Interference Coatings, OIC 2016
國家/地區United States
城市Tucson
期間19/06/1624/06/16

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