@inproceedings{f3c27d093b104e67bb1783e1a825f6aa,
title = "Towards real-time methane (CH4) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators",
abstract = "This digest paper describes the initial efforts on real-time methane (CH4) capture and detection, by using silicon carbide (SiC) resonant microelectromechanical systems (MEMS) coated with SnO2 nanoparticles (NPs). The coating greatly boosts the active adsorption area, toward enhancing the capture. SiC tethered square trampoline devices coated with ultrathin SnO2 layers exhibit robust resonances in both vacuum and air, featuring large capturing area. Closed-loop oscillators with embedded SiC resonators enable fast, real-time readout of device responses upon exposure to CH4. An established electrochemical sensor is employed to verify the signature of CH4. SiC trampoline resonators are tested upon controlled CH4 flux in vacuum, and in atmospheric pressure with N2 carrier, demonstrating clear responses to CH4.",
keywords = "MEMS, gas sensing, methane (CH) capture and detection, nanoparticle (NP), oscillator, resonator, silicon carbide (SiC), surface adsorption, tin dioxide (SnO)",
author = "Zenghui Wang and Peng Wang and Jaesung Lee and Liu, {Chung Chiun} and Feng, {Philip X.L.}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7180953",
language = "???core.languages.en_GB???",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "432--435",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
}