Ti- and Pt-based Schottky gates for InGaSb p-channel HFET development

Geng Ying Liau, Heng Kuang Lin, Pei Chin Chiu, Han Chieh Ho, Jen Inn Chyi, Chih Hsin Ko, Ta Ming Kuan, Meng Kuei Hsieh, Wen Chin Lee, Clement H. Wann

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

Antimonide-based heterostructural p-channel HFET epitaxies consisting of an In0.44Ga0.56Sb quantum well located between AlSb barriers were developed by molecular beam epitaxy. The In0.44Ga 0.56Sb channel layer was compressively strained to enhance hole mobility. Room-temperature Hall measurements to the as-grown materials exhibited a hole mobility as high as 895 cm2/V s. Ti/Pt/Au and Pt/Ti/Pt/Au metals were utilized in Schottky gate metallization processes for evaluating their effects on the device performance. Considering the diffusivity of Pt metals, the devices with as-deposited and annealed Pt-based gates were characterized simultaneously and compared with the ones with Ti-based gates. The devices with Ti-based gates yielded superior dc and rf performances to those with Pt-based gates.

原文???core.languages.en_GB???
主出版物標題2010 International Conference on Indium Phosphide and Related Materials, 22nd IPRM - Conference Proceedings
頁面348-351
頁數4
DOIs
出版狀態已出版 - 2010
事件22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010 - Kagawa, Japan
持續時間: 31 5月 20104 6月 2010

出版系列

名字Conference Proceedings - International Conference on Indium Phosphide and Related Materials
ISSN(列印)1092-8669

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???event.eventtypes.event.conference???22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010
國家/地區Japan
城市Kagawa
期間31/05/104/06/10

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