Thermal expansion coefficient analysis by Fabry-Pérot interferometer

Hung Ta Shih, Yung Cheng Wang, Pi Cheng Tung, Lih Horng Shyu, Chung Ping Chang, Jhe Sian Li

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this study, an interferometer measurement module which has the capability to determine the thermal expansion coefficient of the linear translation aluminum alloy stage for the linear displacement is proposed. This structure consists of two Fabry-Pérot interferometers installed on the stage at different positions for investigating the thermal effect. In the optical arrangement, Fabry-Pérot optical cavity is composed of two plane mirrors and a charge-coupled device(CCD) for inspecting the swept interference fringes induced by the temperature drift. In addition, the constructed measurement module possesses compact optical structure and optimal analysis method. For the high precision laser system, it can provide an estimation for the displacement measurement during the temperature change of six degrees.

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主出版物標題European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019
編輯Richard K. Leach, D. Billington, C. Nisbet, D. Phillips
發行者euspen
頁面298-299
頁數2
ISBN(電子)9780995775145
出版狀態已出版 - 2019
事件19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019 - Bilbao, Spain
持續時間: 3 6月 20197 6月 2019

出版系列

名字European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019

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???event.eventtypes.event.conference???19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019
國家/地區Spain
城市Bilbao
期間3/06/197/06/19

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