@inproceedings{2ca6076e0c384991bde9806a8e4cbf3c,
title = "Thermal expansion coefficient analysis by Fabry-P{\'e}rot interferometer",
abstract = "In this study, an interferometer measurement module which has the capability to determine the thermal expansion coefficient of the linear translation aluminum alloy stage for the linear displacement is proposed. This structure consists of two Fabry-P{\'e}rot interferometers installed on the stage at different positions for investigating the thermal effect. In the optical arrangement, Fabry-P{\'e}rot optical cavity is composed of two plane mirrors and a charge-coupled device(CCD) for inspecting the swept interference fringes induced by the temperature drift. In addition, the constructed measurement module possesses compact optical structure and optimal analysis method. For the high precision laser system, it can provide an estimation for the displacement measurement during the temperature change of six degrees.",
keywords = "Fabry-P{\'e}rot interferometer, Interference fringe, Thermal expansion coefficient",
author = "Shih, {Hung Ta} and Wang, {Yung Cheng} and Tung, {Pi Cheng} and Shyu, {Lih Horng} and Chang, {Chung Ping} and Li, {Jhe Sian}",
note = "Publisher Copyright: {\textcopyright} 2019 European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019. All rights reserved.; 19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019 ; Conference date: 03-06-2019 Through 07-06-2019",
year = "2019",
language = "???core.languages.en_GB???",
series = "European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019",
publisher = "euspen",
pages = "298--299",
editor = "Leach, {Richard K.} and D. Billington and C. Nisbet and D. Phillips",
booktitle = "European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019",
}