Theoretical modeling and fabrication of two-dimensional microstructures by using micro-anode-guided electroplating with real-time image processing

研究成果: 書貢獻/報告類型會議論文篇章同行評審

6 引文 斯高帕斯(Scopus)

摘要

the purpose of this research was to develop a new micro-anode-guided electroplating (MAGE) system equipped by an image-guided positioning controller, to fabricate two-dimensional microstructures. From real-time image, the relative positions of the micro-anode and the microstructures tip can be located and maintained. When the relative position is adjusted, the deposition direction of the microstructures can be controllable and microstructures with different geometries can be fabricated. Moreover, the results of experiment can be explained by the distribution of electro field strength simulated by Comsol Multiphysics 4.2.

原文???core.languages.en_GB???
主出版物標題Recent Development in Machining, Materials and Mechanical Technologies
編輯Jyh-Chen Chen, Usuki Hiroshi, Sheng-Wei Lee, Yiin-Kuen Fuh
發行者Trans Tech Publications Ltd
頁面604-614
頁數11
ISBN(列印)9783038354956
DOIs
出版狀態已出版 - 2015
事件International Conference on Machining, Materials and Mechanical Technologies, IC3MT 2014 - Taipei City, Taiwan
持續時間: 31 8月 20145 9月 2014

出版系列

名字Key Engineering Materials
656-657
ISSN(列印)1013-9826
ISSN(電子)1662-9795

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???event.eventtypes.event.conference???International Conference on Machining, Materials and Mechanical Technologies, IC3MT 2014
國家/地區Taiwan
城市Taipei City
期間31/08/145/09/14

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