The understanding of the bulk trigate MOSFET's reliability through the manipulation of RTN traps

E. R. Hsieh, P. C. Wu, Steve S. Chung, C. H. Tsai, R. M. Huang, C. T. Tsai

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

The manipulation of RTN-trap profiling bas been experimentally demonstrated on both planar and trigate MOSFETs. It was achieved by a simple experimental method to take the 2D profiling of the RTN-trap in both oxide depth (vertical) and channel (lateral) directions in the gate oxide. Then, by arranging various 2D fields for the device stress condition, the positions of RTN traps can be precisely controlled. This is the first being reported that the positions of RTN-traps can be manipulated, showing significant advances for the understanding of the trap generation and the impact on the device reliability. Results have demonstrated why trigate exhibits much worse reliability than the planar ones.

原文???core.languages.en_GB???
主出版物標題2013 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2013
DOIs
出版狀態已出版 - 2013
事件2013 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2013 - Hsinchu, Taiwan
持續時間: 22 4月 201324 4月 2013

出版系列

名字2013 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2013

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???event.eventtypes.event.conference???2013 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2013
國家/地區Taiwan
城市Hsinchu
期間22/04/1324/04/13

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