@inproceedings{0ae91951f0034e3896402c7553793cb6,
title = "The rapid fabrication process for guided-mode resonance filter",
abstract = "The experimental process and results by using non-UV soft lithography method to fabricate thin-film optical guided-mode resonance (GMR) filter, are reported. The parameter stably and high through put 1-D sub-micrometer periodic optical elements are obtained by Embossing technique. The guided-mode resonance filter is taken to demonstrating. Experimental result shows the period of the fabricated filter is about 928nm and the transmittance spectrum of resonance wavelength is approximately 57%.",
keywords = "Grating, Guided-mode resonance, Soft lithography, Sol-Ge, Subwavelength",
author = "Ding, {Ting Jou} and Lue, {Jiann Hwa} and Yang, {Tsung Hsun} and Lee, {Chien Chieh} and Lin, {Sheng Fu} and Chang, {Jenq Yang}",
year = "2011",
doi = "10.1109/NEMS.2011.6017575",
language = "???core.languages.en_GB???",
isbn = "9781612847757",
series = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
pages = "1212--1215",
booktitle = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
note = "6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 ; Conference date: 20-02-2011 Through 23-02-2011",
}