The off-axis alignment of an asphere by a Fizeau interferometer

Chao Wen Liang, Yan An Chen, Cheng Chung Lee

研究成果: 書貢獻/報告類型會議論文篇章同行評審

3 引文 斯高帕斯(Scopus)

摘要

The mechanical position alignment of aspherical surfaces becomes a difficult challenge when the aspherical departure of the surface is high. An optically obscured aspherical surface is even more difficult to be aligned due to the missing obscured paraxial spherical vertex surface area for implementation of the auto-collimating technique. This research paper aims to develop a method to align an obscured aspherical surface with respect to the mechanical axis of a precision rotational stage by analyzing the multiple off-axis interferograms measured from a phase shifting Fizeau interferometer. The alignment induced linearly varying coma is successfully shown in the simulation results. The method can predict the vector direction of mis-alignment errors by least square fitting. An iterative process is possible to be implemented to bring the misaligned aspherical surface back to aligned status.

原文???core.languages.en_GB???
主出版物標題Modeling Aspects in Optical Metrology III
DOIs
出版狀態已出版 - 2011
事件Modeling Aspects in Optical Metrology III - Munich, Germany
持續時間: 23 5月 201124 5月 2011

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
8083
ISSN(列印)0277-786X

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???event.eventtypes.event.conference???Modeling Aspects in Optical Metrology III
國家/地區Germany
城市Munich
期間23/05/1124/05/11

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