The multi-segment adaptive control of the high temperature heat source in a MOCVD vacuum reactor

Keyphrases

• Metal-organic Chemical Vapor Deposition (MOCVD) 100%
• Adaptive Control 100%
• Multi-segment 100%
• Vacuum Reactor 100%
• High-temperature Heat Source 100%
• Proportional-integral Control 33%
• Control Scheme 16%
• Parameter Values 16%
• Steady-state Error 16%
• Controlled Temperature 16%
• Self-regulation 16%
• Temperature Steps 16%

Engineering

• Actuator 100%
• Adaptive Control 100%
• Integral Control 33%
• Simulation Result 16%
• Control Scheme 16%
• Steady State Error 16%