The multi-segment adaptive control of the high temperature heat source in a MOCVD vacuum reactor

Jung Ching Chiu, Chih Kai Hu, Pi Cheng Tung, Tomi T. Li

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

This research focuses on the adaptive control for a high temperature heat source. The significant characteristic of adaptive control is self-regulation. The adaptive control is very important in a MOCVD process since different parameter values to control temperature in each temperature step are required. Simulations and experiments are performed to verify the feasibility of the proposed control scheme for the MOCVD process. The simulation results are compared with those of the experiment. The results show that the steady-state error in proportional-integral (PI) control is about 3°C, and in adaptive control is 0.3°C. It can be found that the performance of the adaptive control is much better than that of the traditional PI control which is commonly used in industry.

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主出版物標題China Semiconductor Technology International Conference 2017, CSTIC 2017
編輯Steve Liang, Ying Shi, Ru Huang, Qinghuang Lin, David Huang, Hanming Wu, Yuchun Wang, Cor Claeys, Kafai Lai, Ying Zhang, Peilin Song, Viyu Shi, Zhen Guo
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781509066940
DOIs
出版狀態已出版 - 4 5月 2017
事件2017 China Semiconductor Technology International Conference, CSTIC 2017 - Shanghai, China
持續時間: 12 3月 201713 3月 2017

出版系列

名字China Semiconductor Technology International Conference 2017, CSTIC 2017

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???event.eventtypes.event.conference???2017 China Semiconductor Technology International Conference, CSTIC 2017
國家/地區China
城市Shanghai
期間12/03/1713/03/17

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