The influence of titanium on the properties of zinc oxide films deposited by radio frequency magnetron sputtering

Engineering & Materials Science

• Magnetron sputtering 100%
• Zinc oxide 99%
• Oxide films 92%
• Titanium 72%
• Substrates 26%
• Carrier concentration 17%
• Energy gap 14%
• Argon 14%
• Structural properties 13%
• Crystalline materials 13%
• Thin films 11%
• Wavelength 11%
• Temperature 10%
• Glass 9%

Physics & Astronomy

• zinc oxides 72%
• oxide films 67%
• radio frequencies 64%
• magnetron sputtering 62%
• titanium 62%
• transmittance 10%
• argon 9%
• atmospheres 8%
• electrical resistivity 7%
• temperature 7%
• glass 7%
• thin films 6%
• wavelengths 5%

Chemical Compounds

• Magnetron Sputtering 86%
• Zinc Oxide 72%
• Liquid Film 36%
• Pressure 9%
• Transmittance 8%
• Glass Substrate 8%
• Polycrystalline Solid 7%
• Band Gap 6%
• Wavelength 5%
• Crystal Structure 4%