The influence of hydrogen on the properties of Al and Ga doped ZnO films at low temperature

Meng Chi Li, Chien Cheng Kuo, Ssu Hsiang Peng, Sheng Hui Chen, Cheng Chung Lee

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

Low resistivity and high transmittance of Al-doped ZnO and Ga-doped ZnO transparent conductive thin films have been achieved by a pulsed DC magnetron sputtering in various hydrogen ambient at low temperature.

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主出版物標題Optical Interference Coatings, OIC 2010
發行者Optical Society of America (OSA)
ISBN(列印)9781557528919
DOIs
出版狀態已出版 - 2010
事件Optical Interference Coatings, OIC 2010 - Tucson, AZ, United States
持續時間: 6 6月 201011 6月 2010

出版系列

名字Optics InfoBase Conference Papers
ISSN(電子)2162-2701

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???event.eventtypes.event.conference???Optical Interference Coatings, OIC 2010
國家/地區United States
城市Tucson, AZ
期間6/06/1011/06/10

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