The effects on heat and oxygen transport of different heat shield and sidewall insulation designs during continuous Czochralski silicon crystal growth

Thi Hoai Thu Nguyen, Jyh Chen Chen, Chun Chung Chen

研究成果: 雜誌貢獻期刊論文同行評審

1 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Physics

Material Science