The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films

Guo Ju Chen, Sheng Rui Jian, Jason Shian Ching Jang, Yung Hui Shih, Yuan Tsung Chen, Shien Uang Jen, Jenh Yih Juang

研究成果: 雜誌貢獻期刊論文同行評審

6 引文 斯高帕斯(Scopus)

摘要

The microstructure and magnetic properties of the amorphous Co-Fe-Zr-B thin films grown on glass substrates by dc magnetron sputtering are investigated using differential scanning calorimetry (DSC), transmission electron microscopy (TEM), and superconducting quantum interference device (SQUID) techniques. The Co-Fe-Zr-B thin films deposited at room temperature were annealed at temperatures ranged from 683 K to 773 K. Experimental results indicated that the coercivity (H c) of the Co-Fe-Zr-B thin films is significantly influenced by residual stress and crystalline phases within the films. The correlation of the coercivity and the microstructure of Co-Fe-Zr-B thin films are discussed. After annealed at 683 K, the coercivity of the Co-Fe-Zr-B film was as low as 1.2 Oe.

原文???core.languages.en_GB???
頁(從 - 到)127-131
頁數5
期刊Intermetallics
30
DOIs
出版狀態已出版 - 11月 2012

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