@inproceedings{ed7637d8f92349aca9578abcfc19af61,
title = "The design of two-zone heater for a MOCVD vacuum reactor",
abstract = "Numerical analysis provides a way to simulate a high temperature system so that a design of heat source can be cost-effective. This research is in design of two-zone heater for a MOCVD vacuum rector. It makes the temperature deviation on wafer reduced to be ±2% from the 10% in single-zone heater. By the design of such a heat source, the temperature uniformity can be improved and applied to the practical process.",
author = "Chang, {Cheng Pin} and Hu, {Chih Kai} and Chiu, {Hsien Chih} and Li, {Tomi T.}",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; China Semiconductor Technology International Conference, CSTIC 2016 ; Conference date: 13-03-2016 Through 14-03-2016",
year = "2016",
month = may,
day = "2",
doi = "10.1109/CSTIC.2016.7464090",
language = "???core.languages.en_GB???",
series = "China Semiconductor Technology International Conference 2016, CSTIC 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Hanming Wu and Hsiang-Lan Lung and Ying Shi and Dong Chen and David Huang and Qi Wang and Kuochun Wu and Ying Zhang and Cor Claeys and Steve Liang and Ru Huang and Beichao Zhang and Peilin Song and Jiang Yan and Qinghuang Lin and Kafai Lai",
booktitle = "China Semiconductor Technology International Conference 2016, CSTIC 2016",
}