The ballistic transport and reliability of the SOI and strained-SOI nMOSFETs with 65nm node and beyond technology

E. R. Hsieh, Derrick W. Chang, S. S. Chung, Y. H. Lin, C. H. Tsai, C. T. Tsai, G. H. Ma

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this paper, the device performance in terms of its transport charactertitics and reliability of the MOS devices on the SOI and strained-SOI have been examined. For the first time, both the transport and reliability characteristics have been established from experimental SOI and SSOI nMOSFETs. It was characterized by two parameters, the ballistic efficiency and the injection velocity. Experimental verifications on nMOSFETs with both technologies with tensile-stress enhancement have been made. For SSOI devices, it shows the expected drain current enhancements. For the reliability evaluations, SOI shows a smaller lattice such that it exhibits a much worse hot carrier (HC) reliability, while SSOI device shows a poorer interface quality verified from the FN-stress experiment. In general, although SSOI exhibits a worse interface quality while its reliability is much better than that of SOI's. Moreover, SSOI device shows a very high injection velocity as a result of the high strain of the device which makes it successful for drain current enhancement.

原文???core.languages.en_GB???
主出版物標題2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA
頁面120-121
頁數2
DOIs
出版狀態已出版 - 2008
事件2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA - Hsinchu, Taiwan
持續時間: 21 4月 200823 4月 2008

出版系列

名字International Symposium on VLSI Technology, Systems, and Applications, Proceedings

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???event.eventtypes.event.conference???2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA
國家/地區Taiwan
城市Hsinchu
期間21/04/0823/04/08

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