@inproceedings{c3d5637d333545b283bd0d69cfc81823,
title = "Synthesis of size- and site-controlled SiGe nanorods on epitaxial Si 0.8Ge0.2 virtual substrates",
abstract = "Two-dimensional (2D) periodic arrays of vertically-aligned SiGe nanorods were successfully produced on (001)Si0.8Ge0.2 virtual substrates by using the polystyrene (PS) nanosphere lithography technique and selective metal-catalytic etching method. The diameter and site of the produced SiGe nanorods were controlled by the RIE-trimmed PS spheres mask used. TEM and electron diffraction analyses results clearly reveal that all the produced SiGe nanorods were perfectly single crystals and their axial orientations were along the [001] direction. TEM/EDS analysis further confirmed that the nanorods produced were pure SiGe nanorods.",
author = "Cheng, {Shao Liang} and Chung, {Cheng Hsuan} and Lee, {Sheng Wei}",
year = "2010",
doi = "10.1109/INEC.2010.5424989",
language = "???core.languages.en_GB???",
isbn = "9781424435449",
series = "INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings",
pages = "1142--1143",
booktitle = "INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings",
note = "2010 3rd International Nanoelectronics Conference, INEC 2010 ; Conference date: 03-01-2010 Through 08-01-2010",
}