Synthesis of cobalt metal nanowire arrays and the interfacial reactions of cobalt nanowires on (001)Si

S. L. Cheng, Y. P. Wei, C. H. Chung

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this study, we report the successful synthesis of large-scale, well-aligned pure cobalt metal nanowire arrays by using the electrodeposition in conjunction with anodic aluminum oxide (AAO) templates technique, and the investigation of the interfacial reactions between the produced Co metal nanowires and (001)Si substrate after different heat treatments. The morphologies, crystal structures, and compositions of the as-synthesized Co nanowires and the Co silicide nanostructures obtained after annealing at various temperatures were systematically investigated by SEM, TEM, and electron diffraction analyses.

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主出版物標題4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
出版狀態已出版 - 2011
事件4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan
持續時間: 21 6月 201124 6月 2011

出版系列

名字Proceedings - International NanoElectronics Conference, INEC
ISSN(列印)2159-3523

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???event.eventtypes.event.conference???4th IEEE International Nanoelectronics Conference, INEC 2011
國家/地區Taiwan
城市Tao-Yuan
期間21/06/1124/06/11

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