@inproceedings{bfe789d0b4914e3fa764940776574d36,
title = "Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range",
abstract = "This paper reports a new simply-supported bridge structure and its use for GHz tunable capacitor application. Unlike traditional MEMS bridges with fully-clamped boundary condition (B.C.) at the anchors, the new bridge structure has simply-supported B.C. Through the implementation of a simply-supported bridge driven by two 100-μm-long ZnO-actuated cantilevers, a compact surface-micromachined tunable capacitor has been fabricated on a single chip without any warping, and shown to be capable of a 1,400% continuous tuning from 0.13 pF to 1.82 pF.",
author = "Lee, {Chuang Yuan} and Chen, {Shih Jui} and Derrick Chi and Hongyu Yu and Kim, {Eun Sok}",
year = "2008",
doi = "10.1109/MEMSYS.2008.4443829",
language = "???core.languages.en_GB???",
isbn = "9781424417933",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "1008--1011",
booktitle = "MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems",
note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",
}