摘要
Applications of lithium niobate thin films for surface acoustic wave (SAW) devices were studied. Metalorganic decomposition and rf sputtering were used to grow the films on diamond/silicon substrates. SAW filters were fabricated by depositing interdigital transducers onto the multilayer LiNbO3/diamond/silicon structures. Results showed SAW propagation in these structures and the experimental findings were found to agree with theoretical predictions.
原文 | ???core.languages.en_GB??? |
---|---|
頁(從 - 到) | 191-193 |
頁數 | 3 |
期刊 | Applied Physics Letters |
卷 | 82 |
發行號 | 2 |
DOIs | |
出版狀態 | 已出版 - 13 1月 2003 |