Surface acoustic wave applications of lithium niobate thin films

T. C. Lee, J. T. Lee, M. A. Robert, S. Wang, T. A. Rabson

研究成果: 雜誌貢獻期刊論文同行評審

30 引文 斯高帕斯(Scopus)

摘要

Applications of lithium niobate thin films for surface acoustic wave (SAW) devices were studied. Metalorganic decomposition and rf sputtering were used to grow the films on diamond/silicon substrates. SAW filters were fabricated by depositing interdigital transducers onto the multilayer LiNbO3/diamond/silicon structures. Results showed SAW propagation in these structures and the experimental findings were found to agree with theoretical predictions.

原文???core.languages.en_GB???
頁(從 - 到)191-193
頁數3
期刊Applied Physics Letters
82
發行號2
DOIs
出版狀態已出版 - 13 1月 2003

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