Subnanometer displacement measurement using common-path grating interferometry

Chyan Chyi Wu; Cheng Chih Hsu; Ju Yi Lee; Chao Jung Chen

Subnanometer displacement measurement using common-path grating interferometry

Chyan Chyi Wu, Cheng Chih Hsu, Ju Yi Lee, Chao Jung Chen

機械工程學系

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

原文	???core.languages.en_GB???
主出版物標題	Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
出版狀態	已出版 - 2008
事件	23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE - Portland, OR, United States 持續時間: 19 10月 2008 → 24 10月 2008

出版系列

名字	Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

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???event.eventtypes.event.conference???	23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
國家/地區	United States
城市	Portland, OR
期間	19/10/08 → 24/10/08

引用此

Wu, C. C., Hsu, C. C., Lee, J. Y., & Chen, C. J. (2008). Subnanometer displacement measurement using common-path grating interferometry. 於 Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE (Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE).

Wu, Chyan Chyi ; Hsu, Cheng Chih ; Lee, Ju Yi 等. / Subnanometer displacement measurement using common-path grating interferometry. Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE. 2008. (Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE).

@inproceedings{fb874aa9a9fd435e91a8f4f23d3608ec,

title = "Subnanometer displacement measurement using common-path grating interferometry",

author = "Wu, {Chyan Chyi} and Hsu, {Cheng Chih} and Lee, {Ju Yi} and Chen, {Chao Jung}",

year = "2008",

language = "???core.languages.en_GB???",

isbn = "9781887706483",

series = "Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE",

booktitle = "Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE",

note = "23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE ; Conference date: 19-10-2008 Through 24-10-2008",

}

Wu, CC, Hsu, CC, Lee, JY & Chen, CJ 2008, Subnanometer displacement measurement using common-path grating interferometry. 於 Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE. Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE, 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE, Portland, OR, United States, 19/10/08.

Subnanometer displacement measurement using common-path grating interferometry. / Wu, Chyan Chyi; Hsu, Cheng Chih; Lee, Ju Yi 等.
Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE. 2008. (Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE).

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

TY - GEN

T1 - Subnanometer displacement measurement using common-path grating interferometry

AU - Wu, Chyan Chyi

AU - Hsu, Cheng Chih

AU - Lee, Ju Yi

AU - Chen, Chao Jung

PY - 2008

Y1 - 2008

UR - http://www.scopus.com/inward/record.url?scp=84884944446&partnerID=8YFLogxK

M3 - 會議論文篇章

AN - SCOPUS:84884944446

SN - 9781887706483

T3 - Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

BT - Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

T2 - 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

Y2 - 19 October 2008 through 24 October 2008

ER -