Study on Reduction of Background Fringes for Defect Detection of Specular Surface

An Chi Wei; Yi Cheng Chang; Jyh Rou Sze

doi:10.1109/APSIPAASC58517.2023.10317452

Study on Reduction of Background Fringes for Defect Detection of Specular Surface

An Chi Wei, Yi Cheng Chang, Jyh Rou Sze

能源工程研究所

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

摘要

For the defect detection of specular surfaces, the image of the light source and other images of surrounding objects tend to be recorded, increasing the complexity of recognition. The method of combined dark-and-bright field illumination has been shown to improve the image quality of the defects on specular surfaces. However, there is still an issue of background fringes. In this study, we design a compensating pattern for diminishing the background fringes. The experimental results show that the proposed method can effectively dilute these fringes and increase the detection efficiency by fewer capture images.

原文	???core.languages.en_GB???
主出版物標題	2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023
發行者	Institute of Electrical and Electronics Engineers Inc.
頁面	2163-2167
頁數	5
ISBN（電子）	9798350300673
DOIs	https://doi.org/10.1109/APSIPAASC58517.2023.10317452
出版狀態	已出版 - 2023
事件	2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023 - Taipei, Taiwan 持續時間: 31 10月 2023 → 3 11月 2023

出版系列

名字	2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023

???event.eventtypes.event.conference???

???event.eventtypes.event.conference???	2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023
國家/地區	Taiwan
城市	Taipei
期間	31/10/23 → 3/11/23

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10.1109/APSIPAASC58517.2023.10317452

應用於半導體製程氣體特性監控之智慧型波前感測技術開發
Wei, A.-C. (PI)
1/08/23 → 31/07/24
研究計畫: Research

引用此

Wei, A. C., Chang, Y. C., & Sze, J. R. (2023). Study on Reduction of Background Fringes for Defect Detection of Specular Surface. 於 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023 (頁 2163-2167). (2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APSIPAASC58517.2023.10317452

Wei, An Chi ; Chang, Yi Cheng ; Sze, Jyh Rou. / Study on Reduction of Background Fringes for Defect Detection of Specular Surface. 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023. Institute of Electrical and Electronics Engineers Inc., 2023. 頁 2163-2167 (2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023).

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abstract = "For the defect detection of specular surfaces, the image of the light source and other images of surrounding objects tend to be recorded, increasing the complexity of recognition. The method of combined dark-and-bright field illumination has been shown to improve the image quality of the defects on specular surfaces. However, there is still an issue of background fringes. In this study, we design a compensating pattern for diminishing the background fringes. The experimental results show that the proposed method can effectively dilute these fringes and increase the detection efficiency by fewer capture images.",

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Wei, AC, Chang, YC & Sze, JR 2023, Study on Reduction of Background Fringes for Defect Detection of Specular Surface. 於 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023. 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023, Institute of Electrical and Electronics Engineers Inc., 頁 2163-2167, 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023, Taipei, Taiwan, 31/10/23. https://doi.org/10.1109/APSIPAASC58517.2023.10317452

Study on Reduction of Background Fringes for Defect Detection of Specular Surface. / Wei, An Chi; Chang, Yi Cheng; Sze, Jyh Rou.
2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 2163-2167 (2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023).

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

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AU - Wei, An Chi

AU - Chang, Yi Cheng

AU - Sze, Jyh Rou

PY - 2023

Y1 - 2023

N2 - For the defect detection of specular surfaces, the image of the light source and other images of surrounding objects tend to be recorded, increasing the complexity of recognition. The method of combined dark-and-bright field illumination has been shown to improve the image quality of the defects on specular surfaces. However, there is still an issue of background fringes. In this study, we design a compensating pattern for diminishing the background fringes. The experimental results show that the proposed method can effectively dilute these fringes and increase the detection efficiency by fewer capture images.

AB - For the defect detection of specular surfaces, the image of the light source and other images of surrounding objects tend to be recorded, increasing the complexity of recognition. The method of combined dark-and-bright field illumination has been shown to improve the image quality of the defects on specular surfaces. However, there is still an issue of background fringes. In this study, we design a compensating pattern for diminishing the background fringes. The experimental results show that the proposed method can effectively dilute these fringes and increase the detection efficiency by fewer capture images.

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BT - 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 31 October 2023 through 3 November 2023

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Wei AC, Chang YC, Sze JR. Study on Reduction of Background Fringes for Defect Detection of Specular Surface. 於 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 2163-2167. (2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023). doi: 10.1109/APSIPAASC58517.2023.10317452

Study on Reduction of Background Fringes for Defect Detection of Specular Surface

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應用於半導體製程氣體特性監控之智慧型波前感測技術開發

引用此