@inproceedings{9020ab93fe9c480abdbd4a2e41fd2998,
title = "Study on IoT and Big Data Analysis of Furnace Process Exhaust Gas Leakage",
abstract = "Modern FABs use a large number of high-energy processes such as plasma, CVD, and ion implantation; the furnace is one of the important tools of semiconductor manufacturing. The FAB installed FTIR system due to the 12” furnace tools based on the aforementioned production management requirements. This study used open-type FTIR and integrated IoT mechanism to connect to the cloud, which is suitable for a variety of gaseous pollutants. This study set up two measuring points of furnace process tools in the 12” factory of Hsinchu Science Park in Taiwan. This study obtained FTIR measurements, and according to the OHSA regulations, this study is set in the cloud database for big data analysis and decision-making, when the upper limits of TEOS, C2H4, and CO are 0.6 ppm, 2.0 ppm, and 1.7 ppm and the lower limits of TEOS, C2H4, and CO are 0.4 ppm, 1.5 ppm, and 1 ppm. The application architecture of this study can be extended to other semiconductor processes, so that IoT integration and big data operations can be performed for all processes; this is an important step in promoting FAB intelligent production and an important contribution of this study.",
keywords = "Big data, Exhaust gas, Furnace, Gas leakage, IoT",
author = "Zhou, {Yu Wen} and Chang, {Kuo Chi} and Pan, {Jeng Shyang} and Chu, {Kai Chun} and Horng, {Der Juinn} and Lin, {Yuh Chung} and Huang Jing",
note = "Publisher Copyright: {\textcopyright} 2020, Springer Nature Singapore Pte Ltd.; 15th International Conference on Intelligent Information Hiding and Multimedia Signal Processing, IIH-MSP 2019, held in conjunction with the 12th International Conference on Frontiers of Information Technology, Applications and Tools, FITAT 2019 ; Conference date: 18-07-2019 Through 20-07-2019",
year = "2020",
doi = "10.1007/978-981-13-9714-1_5",
language = "???core.languages.en_GB???",
isbn = "9789811397134",
series = "Smart Innovation, Systems and Technologies",
publisher = "Springer Science and Business Media Deutschland GmbH",
pages = "41--49",
editor = "Jeng-Shyang Pan and Jianpo Li and Pei-Wei Tsai and Jain, {Lakhmi C.} and Jain, {Lakhmi C.} and Jain, {Lakhmi C.} and Jain, {Lakhmi C.}",
booktitle = "Advances in Intelligent Information Hiding and Multimedia Signal Processing - Proceedings of the 15th International Conference on IIH-MSP in conjunction with the 12th International Conference on FITAT 2019",
}