Fe-based metallic glass possesses high hardness and brittleness. It is a hard-to-cut metal material and difficult to machine by conventional methods. Although electrical discharge machining (EDM) has advantages in machining hard-to-cut metal materials, recast layer, pores, and micro cracks will form on the machined surface after machining. The study used a helical tool for the micro electrical discharge drilling (µ-EDD) process on Fe-based metallic glass. The influence of processing parameters, including the pulse on time, gap voltage, duty factor, and spindle rotational speed on the micro hole machining quality characteristics was investigated. The helical tool with SiC electrophoretic deposited (EPD) film was used to polish the inner surface of the electrical discharged micro hole. The findings show that the best micro hole accuracy, tool wear length, and inner surface were obtained at the spindle rotation speed of 1150 rpm, pulse on time of 5 µs, gap voltage of 30 V, and duty factor of 40%. The inner surface roughness can be reduced to 0.018 µm by using EPD tool. The inner surface was polished up to form a mirror surface.