摘要
Aiming at future large silicon tracking devices, 4×8 cm2 silicon microstrip sensors were fabricated, and processes related to such sensors were studied. Fabrication of 4×8 cm2 silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4×64 cm2 long ladder, by assembling eight pieces of 4×8 cm2 sensors together, had been tested at CERN SPS area. Test result shows such detector is feasible.
原文 | ???core.languages.en_GB??? |
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頁面 | 160-163 |
頁數 | 4 |
出版狀態 | 已出版 - 1995 |
事件 | Proceedings of the 1994 Nuclear Science Symposium and Medical Imaging Conference. Part 1 (of 4) - Norfolk, VA, USA 持續時間: 30 10月 1994 → 5 11月 1994 |
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???event.eventtypes.event.conference??? | Proceedings of the 1994 Nuclear Science Symposium and Medical Imaging Conference. Part 1 (of 4) |
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城市 | Norfolk, VA, USA |
期間 | 30/10/94 → 5/11/94 |