Solid immersion lenses in planar waveguides

De Hao Chien; Chang Heng Tsai; Shih Shou Lo; Chii Chang Chen; Jenq Yang Chang

doi:10.1109/JLT.2005.854036

Solid immersion lenses in planar waveguides

De Hao Chien, Chang Heng Tsai, Shih Shou Lo, Chii Chang Chen, Jenq Yang Chang

光電科學與工程學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

9 引文斯高帕斯（Scopus）

摘要

In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.

原文	???core.languages.en_GB???
文章編號	1506853
頁（從 - 到）	2746-2748
頁數	3
期刊	Journal of Lightwave Technology
卷	23
發行號	9
DOIs	https://doi.org/10.1109/JLT.2005.854036
出版狀態	已出版 - 9月 2005

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10.1109/JLT.2005.854036

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Solid immersion lenses in planar waveguides

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