Solid immersion lenses in planar waveguides

De Hao Chien, Chang Heng Tsai, Shih Shou Lo, Chii Chang Chen, Jenq Yang Chang

研究成果: 雜誌貢獻期刊論文同行評審

9 引文 斯高帕斯(Scopus)

摘要

In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.

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文章編號1506853
頁(從 - 到)2746-2748
頁數3
期刊Journal of Lightwave Technology
23
發行號9
DOIs
出版狀態已出版 - 9月 2005

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