SiOx:C/SiO2-like gas barrier multilayer thin films deposited by radio frequency magnetron sputtering-based plasma polymerization system

Wei Bo Liao, Ya Chen Chang, Yan An Lin, Hsiao Lun Chen, Hung Pin Chen, Hung Sen Wei, Chien Cheng Kuo

研究成果: 雜誌貢獻期刊論文同行評審

9 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds