@inproceedings{052247a4fce6400996343539942ab1e8,
title = "Simulation Framework of Laser Produced Tin Plasma Extreme Ultraviolet Light Emission Based on Quasi-Steady State Approach of Plasma Radiative Property",
abstract = "Enhancement of EUV emission from laser-produced plasma is a crucial issue for semiconductor manufacturing. One-dimensional simulation framework is developed with quasi-equilibrium assumption, which saves computational cost and has qualitative agreement with experiments.",
author = "Wu, {Chun Tse} and Yao-Li Liu and Lai, {Po Yen} and Chen, {Shih Hung}",
note = "Publisher Copyright: CLEO 2023 {\textcopyright} Optica Publishing Group 2023, {\textcopyright} 2023 The Author(s); CLEO: Applications and Technology, CLEO:A and T 2023 - Part of Conference on Lasers and Electro-Optics 2023 ; Conference date: 07-05-2023 Through 12-05-2023",
year = "2023",
doi = "10.1364/CLEO_AT.2023.JTu2A.12",
language = "???core.languages.en_GB???",
series = "CLEO: Applications and Technology, CLEO:A and T 2023",
publisher = "Optical Society of America",
booktitle = "CLEO",
}