An out-of-plane guided-mode resonance (GMR) filter on a single Si chip using a two-layer polysilicon surface micromachining process was proposed. To the best of our knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon microoptical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550nm and 1310nm could be as low as 40dB and the channel passband at 1550nm was 20nm.
|頁（從 - 到）||275-278|
|期刊||Proceedings of SPIE - The International Society for Optical Engineering|
|出版狀態||已出版 - 2004|
|事件||Nanoengineering: Fabrication, Properties, Optics, and Devices - Denver, CO, United States|
持續時間: 4 8月 2004 → 6 8月 2004