Si-based guided-mode resonance filter on a micro-optical bench

Keyphrases

• Si-based 100%
• Guided-mode Resonance Filter 100%
• Micro-optical Bench 100%
• Two-layer 50%
• Polysilicon 50%
• Surface Micromachining Process 50%
• Si chip 50%
• Optical Filters 50%
• Extinction Ratio 50%
• Bidirectional Transceiver 50%

Engineering

• Guided Mode 100%
• Passbands 50%
• Directional 50%
• Transceiver 50%
• Surface Micro-Machining 50%
• Optical Filter 50%
• Extinction Ratio 50%
• Polysilicon 50%