Sensitive optical monitoring with error compensation

Kai Wu, Sheng Hui Chen, Ming Sheng Chang, Cheng Chung Lee

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

A way to calculate fluctuant refractive indices and thickness compensation during the deposition has been proposed. A novel monitor method was thereby derived, and a narrow band pass filter with excellent performance has been demonstrated.

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主出版物標題Optical Interference Coatings, OIC 2007
發行者Optical Society of America (OSA)
ISBN(列印)1557528411, 9781557528414
DOIs
出版狀態已出版 - 2007
事件Optical Interference Coatings, OIC 2007 - Tucson, AZ, United States
持續時間: 3 6月 20073 6月 2007

出版系列

名字Optics InfoBase Conference Papers
ISSN(電子)2162-2701

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???event.eventtypes.event.conference???Optical Interference Coatings, OIC 2007
國家/地區United States
城市Tucson, AZ
期間3/06/073/06/07

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