Self-aligned nanolenses with multilayered Ge/SiO2 core/shell structures on Si (001)

Huai Chung Chen, Sheng Wei Lee, Lih Juann Chen

研究成果: 雜誌貢獻期刊論文同行評審

8 引文 斯高帕斯(Scopus)


A method was developed to fabricate multilayered Ge/SiO2 core/shell nanostructures with a lenticular shape with excellent uniformity over a large area. It was observed that the dot-size uniformity improved and the average dot size increased as the number of multilayers increased. The self-assembled multilayered Ge-QD samples were etched in aqueous tetramethylammonium hydroxide (TMAH) solutions of different concentrations for various periods of time. The reflection spectra of the multilayers were measured using a Bomem Fourier transform infrared (FTIR) spectrometer. The samples with the Ge/SiO2 nanolens stacks exhibited a reflectivity with an increase of about 77% at around 1.5μm above conventional self-assembled Ge-QD/Si-spacer multilayers. The combination of photoluminescence and reflectance properties of multilayered nanolenses means that they have potential for use as Si-compatible photodetector materials for telecommunications.

頁(從 - 到)222-226
期刊Advanced Materials
出版狀態已出版 - 20 1月 2007


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