Residual stress analysis for oxide thin film deposition on flexible substrate using finite element method

Hsi Chao Chen, Chen Yu Huang, Ssu Fan Lin, Sheng Hui Chen

研究成果: 書貢獻/報告類型會議論文篇章同行評審

1 引文 斯高帕斯(Scopus)

指紋

深入研究「Residual stress analysis for oxide thin film deposition on flexible substrate using finite element method」主題。共同形成了獨特的指紋。

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds