Replication of nano/micro-scale features using bulk metallic glass mold prepared by femtosecond laser and imprint processes

Y. C. Chen, J. P. Chu, J. S.C. Jang, C. W. Hsieh, Y. Yang, C. L. Li, Y. M. Chen, J. Y. Jeng

研究成果: 雜誌貢獻期刊論文同行評審

13 引文 斯高帕斯(Scopus)

摘要

This study describes the replication of nano/micro-scale features using a Pd40Ni40P20 bulk metallic glass (BMG) mold prepared using a femtosecond laser and nanoimprinting process. The use of the beam shaper feature of the femtosecond laser enabled the rapid fabrication of periodic nanostripes over an area of ∼5 × 4 mm2 on the BMG mold following a single pulse of irradiation. The ablation pitch of the nanostructure irradiated with 100 mW of femtosecond laser power was determined to be 175.8 nm. The imprinting results demonstrate the applicability of Pd-based BMG in the replication of mold features ranging from 100 μm to 90 nm. Additionally, Pd-based BMG can itself be used as a mold to transfer features onto Au-based BMG and polydimethylsiloxane, where the results could be used to ascertain the workability of BMG for molding in a nano/micro-imprint process.

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文章編號035030
期刊Journal of Micromechanics and Microengineering
23
發行號3
DOIs
出版狀態已出版 - 3月 2013

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