Refractive index and thickness of coating measurement interferometer

Chao Yuan Wu, Kai Wu, Sheng Hui Chen, Cheng Chung Leea

研究成果: 書貢獻/報告類型會議論文篇章同行評審

1 引文 斯高帕斯(Scopus)


We proposed a method to measure the optical constants of thin film through polarizing phase shifting interferometer based on Twyman-Green interferometer structure. A broadband light source coming with a narrow band-pass filter was used to generate a low coherence light and the wavelength is tunable by changing the filter. A pixelated micro-polarizer mask on the detection camera made phase shifting array to make different phase shifts at once. Therefore, we can use one single interferogram to extract phase information, and it is effective in reducing environmental vibration. The refractive index and thickness of thin film can be derived from the obtained reflection coefficient's magnitude and phase. The measurement results were compared with the results obtained by an ellipsometer.

主出版物標題Thin Film Solar Technology
出版狀態已出版 - 2009
事件Thin Film Solar Technology - San Diego, CA, United States
持續時間: 2 8月 20094 8月 2009


名字Proceedings of SPIE - The International Society for Optical Engineering


???event.eventtypes.event.conference???Thin Film Solar Technology
國家/地區United States
城市San Diego, CA


深入研究「Refractive index and thickness of coating measurement interferometer」主題。共同形成了獨特的指紋。