Realization of optical pickup head by using stacked silicon based microoptical system

C. M. Wang; H. C. Lan; J. Y. Chang; C. C. Lee

doi:10.1117/12.559213

Realization of optical pickup head by using stacked silicon based microoptical system

C. M. Wang
, H. C. Lan
, J. Y. Chang
, C. C. Lee

研究成果: 雜誌貢獻 › 會議論文 › 同行評審

1 引文斯高帕斯（Scopus）

摘要

We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

原文	???core.languages.en_GB???
文章編號	13
頁（從 - 到）	115-124
頁數	10
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	5524
DOIs	https://doi.org/10.1117/12.559213
出版狀態	已出版 - 2004
事件	Novel Optical Systems Design and Optimization VII - Denver, CO, United States 持續時間: 2 8月 2004 → 3 8月 2004

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10.1117/12.559213

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@article{cec01cea0563406dbeb6e79aa0176f12,

title = "Realization of optical pickup head by using stacked silicon based microoptical system",

abstract = "We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.",

keywords = "Anisotropic etching, Diffractive optical elements, Microoptics, SiNx film",

author = "Wang, \{C. M.\} and Lan, \{H. C.\} and Chang, \{J. Y.\} and Lee, \{C. C.\}",

year = "2004",

doi = "10.1117/12.559213",

language = "???core.languages.en\_GB???",

volume = "5524",

pages = "115--124",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Novel Optical Systems Design and Optimization VII ; Conference date: 02-08-2004 Through 03-08-2004",

}

TY - JOUR

T1 - Realization of optical pickup head by using stacked silicon based microoptical system

AU - Wang, C. M.

AU - Lan, H. C.

AU - Chang, J. Y.

AU - Lee, C. C.

PY - 2004

Y1 - 2004

N2 - We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

AB - We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

KW - Anisotropic etching

KW - Diffractive optical elements

KW - Microoptics

KW - SiNx film

UR - https://www.scopus.com/pages/publications/13544257217

U2 - 10.1117/12.559213

DO - 10.1117/12.559213

M3 - 會議論文

AN - SCOPUS:13544257217

SN - 0277-786X

VL - 5524

SP - 115

EP - 124

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 13

T2 - Novel Optical Systems Design and Optimization VII

Y2 - 2 August 2004 through 3 August 2004

ER -

Realization of optical pickup head by using stacked silicon based microoptical system

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