摘要
We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.
原文 | ???core.languages.en_GB??? |
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文章編號 | 13 |
頁(從 - 到) | 115-124 |
頁數 | 10 |
期刊 | Proceedings of SPIE - The International Society for Optical Engineering |
卷 | 5524 |
DOIs | |
出版狀態 | 已出版 - 2004 |
事件 | Novel Optical Systems Design and Optimization VII - Denver, CO, United States 持續時間: 2 8月 2004 → 3 8月 2004 |