Realization of optical pickup head by using stacked silicon based microoptical system

C. M. Wang, H. C. Lan, J. Y. Chang, C. C. Lee

研究成果: 雜誌貢獻會議論文同行評審

1 引文 斯高帕斯(Scopus)

摘要

We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

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文章編號13
頁(從 - 到)115-124
頁數10
期刊Proceedings of SPIE - The International Society for Optical Engineering
5524
DOIs
出版狀態已出版 - 2004
事件Novel Optical Systems Design and Optimization VII - Denver, CO, United States
持續時間: 2 8月 20043 8月 2004

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