TY - JOUR
T1 - Realization of free-space optical pickup head with stacked Si-based phase elements
AU - Chang, Jenq Yang
AU - Wang, Chih Ming
AU - Lee, Chien Chieh
AU - Shih, Hsi Fu
AU - Wu, Mount Learn
N1 - Funding Information:
Manuscript received July 13, 2004; revised August 19, 2004. This work was supported in part by the MOE Program for Promoting Academic Excellence at Universities under Grant 91-E-FA06-1-4. J.-Y. Chang and C.-M. Wang are with the Institute of Optical Sciences, National Central University, Jung-Li 32054, Taiwan, R.O.C. (e-mail: [email protected]; [email protected]). C.-C. Lee is with the Optical Sciences Center, National Central University, Jung-Li 32054, Taiwan, R.O.C. (e-mail: [email protected]). H.-F. Shih is with Electro Engineering, National ChungHsing University, Taichung 402, Taiwan (e-mail: [email protected]). M.-L. Wu is with the NeoStones MicroFabrication Corporation, Hsinchu 300, Taiwan, R.O.C. (e-mail: [email protected]). Digital Object Identifier 10.1109/LPT.2004.836896
PY - 2005/1
Y1 - 2005/1
N2 - We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650-nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were suspended on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.
AB - We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650-nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were suspended on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.
KW - Diffractive optical elements
KW - Microoptoelectromechanical systems (MOEMS)
KW - Pickup module
KW - SiN membrane
UR - http://www.scopus.com/inward/record.url?scp=12344275842&partnerID=8YFLogxK
U2 - 10.1109/LPT.2004.836896
DO - 10.1109/LPT.2004.836896
M3 - 期刊論文
AN - SCOPUS:12344275842
SN - 1041-1135
VL - 17
SP - 214
EP - 216
JO - IEEE Photonics Technology Letters
JF - IEEE Photonics Technology Letters
IS - 1
ER -