摘要
A new method for preventing the periodic nonlinearity in heterodyne interferometer is presented. This method is based on the non-polarizing configuration. To experimentally verify this new configuration, a real displacement is measured. The periodic nonlinearity of less than 7 pm is demonstrated. Our system has some merits, such as simple optical setup, easy operation, and fewer optical components are used. In addition, compared with conventional interferometer, it has double measurement resolution.
| 原文 | ???core.languages.en_GB??? |
|---|---|
| 頁面 | 5 |
| 頁數 | 1 |
| 出版狀態 | 已出版 - 2002 |
| 事件 | Proceeding of the International Symposium on Precision Mechanical Measurements, ISIST 2002 - Hefei, China 持續時間: 11 8月 2002 → 16 8月 2002 |
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| ???event.eventtypes.event.conference??? | Proceeding of the International Symposium on Precision Mechanical Measurements, ISIST 2002 |
|---|---|
| 國家/地區 | China |
| 城市 | Hefei |
| 期間 | 11/08/02 → 16/08/02 |