Precise determination of absolute coverage of thin films by layer-resolved surface states

Cheng Maw Cheng, Ku Ding Tsuei, Chi Ting Tsai, Dah An Luh

研究成果: 雜誌貢獻期刊論文同行評審

7 引文 斯高帕斯(Scopus)

摘要

We report a technique to determine the coverage of metallic thin films by analyzing layer-resolved surface states with photoemission by using atomically flat AgAu (111) thin films as a test system. We analyzed the surface state on Au(111) covered with Ag up to 4 ML with atomic resolution, and precisely determined the total Ag coverage of AgAu (111) through a line-shape analysis. With precise measurements of the absolute coverage of thin films becoming possible, one can calibrate the tooling factor of evaporators with unprecedented accuracy.

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文章編號163102
期刊Applied Physics Letters
92
發行號16
DOIs
出版狀態已出版 - 2008

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